The 77th JSAP Autumn Meeting, 2016

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Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[13p-P7-1~17] 6.4 Thin films and New materials

Tue. Sep 13, 2016 4:00 PM - 6:00 PM P7 (Exhibition Hall)

4:00 PM - 6:00 PM

[13p-P7-11] Fundamental study on deposition parameters for oxide film deposition
by arc plasma method

〇Kenta Takeuchi1, Koki Watanabe1, Masaki Tanemura1 (1.Nagoya Institute of Technology)

Keywords:arc plasma method