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▲ [13p-P8-34] Voltage Controlled Magnetic Anisotropy Change in Different Temperature Annealed Magnetic Tunnel Junctions
Keywords:Voltage controlled magnetic anisotropy, Magnetic tunnel junction
MgO-based magnetic tunnel junction (MTJ) is of great interest as a non-volatile memory. Voltage controlled magnetic anisotropy (VCMA) is an ideal technology in such a memory devices. CoFeB/MgO system has been employed in MTJs as well as VCMA studies. Although perpendicular magnetic anisotropy in CoFeB/MgO has large change after post-annealing, post-annealing temperature dependence of VCMA has not been clarified yet. In this study, we have fabricated Ta/ CoFeB/ MgO/ CoFeB MTJs with different post-annealing temperature and characterized the VCMA of CoFeB.