The 77th JSAP Autumn Meeting, 2016

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[14a-A37-1~10] 6.4 Thin films and New materials

Wed. Sep 14, 2016 9:00 AM - 11:45 AM A37 (306-307)

Hideyuki Kawasoko(Tohoku Univ.)

9:00 AM - 9:15 AM

[14a-A37-1] Evaluation of surface roughness of SiO2 thin films by PLD using a SiO target

〇Shintaro Nishi1, Satoshi Ueoka1, Shota Taniwaki1, Haruhiko Yoshida1, Koji Arafune1, Shin-ichi Sato1, Yasushi Hotta1 (1.Univ. of Hyogo)

Keywords:High-k