[14a-C31-1~10] 3.7 Laser processing

[14a-C31-10] Formation of periodic micro/nanostructure onto silicone rubber surface by vacuum UV laser (3)

〇Setyo Pambudi Wisnu¹, Masayuki Okoshi¹, Hidetoshi Nojiri¹, Tsugito Yamashita² (1.National Defense Academy, 2.Kanto Gakuin University)

Keywords:ArF excimer laser, silicone rubber, periodic micro/nano-swelling structure

Silica glass microspheres 2.5 micron in diameter was aligned into single layer on silicone rubber surface, then exposured by 193 nm ArF excimer laser at single-pulse fluence of 10 mJ/cm² and at laser shot number of 1800 constant. The pulse repetition rate was varied from 1 to 20 Hz. As a result, the silicone rubber surface underneath each microsphere selectively swelled during the ArF laser irradiation, of which also found to be periodical at regular intervals of approximately 2.5 micron and 1.3 micron in height clearly when the pulse repetition rate was set at 1 Hz.