10:00 AM - 10:15 AM
[14a-D63-4] Evaluation of Characteristics in VOx Thin-Films Obtained by Reduced-Pressure Firing of Precursor Films on Si3N4/SiO2/Si Substrates Fabricated by MOD
Keywords:MOD, VOx thin films, bolometer
Presentation information
Oral presentation
1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering
[14a-D63-1~10] 1.3 Novel technologies and interdisciplinary engineering
Wed. Sep 14, 2016 9:15 AM - 12:00 PM D63 (Bandaijima Bldg.)
Akihiro Matsutani(Titech)