[14p-A23-1~9] Classification and designation on carbon based films as diamond-like carbon (DLC) films -Advanced measurement technology to support the standardization, and industrial application aimed at the world market-

[14p-A23-1] DLC films - Significance of establishment of international standards

〇Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech.)

Keywords:DLC film, ISO

A term DLC is originated from the article entitled " Ion-Beam Deposition of Thin Films of Diamondlike Carbon" reported by Aisenberg and Chabot in 1971. The abstract of the article is that carbon in the films deposited by ion beam method behaved as to be carbon in diamond. On the meeting of the Japanese Applied Physics Society, the research reports related to the DLC or amorphous carbon were submitted from 1970's. In 1980's, the term DLC was used and the research of DLC films was developed at this meeting. Today, establishment work of international standards is carried out.