[14p-A23-1~9] Classification and designation on carbon based films as diamond-like carbon (DLC) films -Advanced measurement technology to support the standardization, and industrial application aimed at the world market-

△ [14p-A23-9] Evaluation of structure of DLC films by BEMA and NEXAFS methods

〇(D)XiaoLong Zhou¹, Satoru Arakawa¹, Tsuneo Suzuki¹, Keiji Komatsu¹, Kazuhiro Kanda², Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Univ. of Hyogo)

Keywords:DLC, BEMA, NEXAFS

C-sp³, C-sp², and termination hydrocarbon structure analysis is one of the extremely important themes in the structural analysis of the DLC films. In this study, the BEMA and NEXAFS methods were used to structural analysis of different DLC films produced by four different deposition methods. We compare the results of the sp³/(sp³+sp²) of DLC films obtained from the BEMA and NEXAFS method; it shows that at low hydrogen content they are consistent, and deviation occurred when the hydrogen content is high in the DLC films. These facts indicate that the increase of hydrocarbon structure in the DLC films leading to the model fitting of BEMA becomes involved; such that the conductivity of the DLC film also becomes low is considered to significant impact on the measurement accuracy of the NEXAFS.