[14p-A26-1~16] 6.2 Carbon-based thin films

[14p-A26-14] The Improvement of the Quality Factor of the Single Crystal Diamond Mechanical Resonators

〇Meiyong Liao¹, Masaya Toda², Liwen Sang¹, Tokuyuki Teraji¹, Masataka Imura¹, Yasuo Koide¹ (1.NIMS, 2.Tohoku Univ)

Keywords:MEMS, Quality factor, Single crystal diamond

In this work, we make efforts to improve the Q-factor by improving the crystal quality of the SCD MEMS cantilevers or bridges. The single crystal diamond cantilevers were fabricated by using the IAL method. In order to improve the crystal quality of the SCD cantilevers, relative thick intrinsic SCD epilayers were grown on the implanted HPHT type Ib-diamond substrates. The length of the SCD cantilevers ranges from 30-140 µm, width from 2-12 µm, and thickness from 0.17 to 1.98 µm. The resonance frequency well followed the inverse power law relationship with the length of the cantilevers with an estimated Young’s modus around 1100GPa, consistent with our previous reports. As a result, the Q-factor was significantly improved from several hundred to more than ten thousand after growing the thick SCD epilayers. The maximum Q-factor at this moment reaches up to 39417.