The 77th JSAP Autumn Meeting, 2016

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14p-A26-1~16] 6.2 Carbon-based thin films

Wed. Sep 14, 2016 1:15 PM - 5:45 PM A26 (203-204)

Makoto Kasu(Saga Univ.), Toshimichi Ito(Osaka Univ.), Hitoshi Umezawa(AIST)

1:30 PM - 1:45 PM

△ [14p-A26-2] Heteroepitaxial Growth of Diamond on 3C-SiC/Si Using High Density Plasma and Investigating of Threading Dislocations

〇Junya Yaita1,2, Takayuki Iwasaki1,2, Meralys Natal3, Stephen Saddow3, Mutsuko Hatano1,2 (1.Tokyo Inst. of Tech., 2.JST-CREST, 3.Univ. of South Florida)

Keywords:diamond, Heteroepitaxial