The 77th JSAP Autumn Meeting, 2016

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14p-A26-1~16] 6.2 Carbon-based thin films

Wed. Sep 14, 2016 1:15 PM - 5:45 PM A26 (203-204)

Makoto Kasu(Saga Univ.), Toshimichi Ito(Osaka Univ.), Hitoshi Umezawa(AIST)

3:30 PM - 3:45 PM

[14p-A26-9] Fabrication of triple-gate fin-type hydrogenated diamond MOSFETs

Jiangwei LIU1, Hirotaka Oosato1, Xi Wang1, Meiyong Liao1, Yasuo Koide1 (1.NIMS)

Keywords:diamond