[14p-B13-1~15] 12.3 Functional Materials and Novel Devices

[14p-B13-14] Si₃N₄/EO polymer hybrid modulator

〇Hiromu Sato¹, Kazuhiro Yamamoto^1,2, Shiyoshi Yokoyama^1,2 (1.IGSES, Kyushu Univ., 2.IMCE, Kyushu Univ.)

Keywords:electro-optic polymer, silicon nitrogen

We designed and fabricated hybrid modulator using silicon nitride core and EO polymer clad. The measured half-wavelength voltage of the fabricated modulator is 4.4 V at 1550nm. The half-waveguide voltage of the modulator can be reduced by further design and fabrication of the waveguide structure for optimizing confinement factor.