The 77th JSAP Autumn Meeting, 2016

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Oral presentation

3 Optics and Photonics » 3.15 Silicon photonics

[14p-B4-1~15] 3.15 Silicon photonics

Wed. Sep 14, 2016 1:45 PM - 6:00 PM B4 (Exhibition Hall)

Yuya Shoji(Titech), Tsuyoshi Horikawa(AIST), Kenji Kintaka(AIST)

3:00 PM - 3:15 PM

[14p-B4-5] InP template layer thickness dependence of GaInAsP-InP layer grown on directly-bonded InP/Si substrate

〇(M1)Yuya Onuki1, Tetsuo Nishiyama1, Naoki Kamada1, Han Xu1, Masaki Aikawa1, Kazuki Uchida1, Hirokazu Sugiyama1, Hirokazu Shimomura1 (1.Sophia Univ.)

Keywords:InP/Si, Directly wafer bonding, Thickness dependence