Dependence of Wet Etching Characteristics of P(VDF/TrFE) on the Fluence of Proton Beam

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

Wed. Sep 14, 2016 1:45 PM - 5:15 PM B6 (Exhibition Hall)

Yasuhito Gotoh(Kyoto Univ.), Satoshi Ninomiya(Yamanashi Univ.)

2:30 PM - 2:45 PM

〇Shimon Hayakawa¹, Hideomi Hayashi¹, Yoshikazu Koike¹, Hiroyuki Nishikawa¹ (1.Shibaura inst.)

Keywords:P(VDF/TrFE), Proton Beam, Wet Etching