Microfabrication of embedded optical waveguide struture in flexible electrical circuit substrate by proton beam writing (PBW) procedure

Ryuhei Takahashi; Satoshi Miura; Ryota Saruya; Shunsuke Kawabata; Kenta Miura; Wataru Kada; Masashi Koka; Takahiro Satoh; Tomihiro Koka; Osamu Hanaizumi; Kumar Parajuli

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

[14p-B6-1~12] 7.5 Ion beams

Wed. Sep 14, 2016 1:45 PM - 5:15 PM B6 (Exhibition Hall)

Yasuhito Gotoh(Kyoto Univ.), Satoshi Ninomiya(Yamanashi Univ.)

2:45 PM - 3:00 PM

[14p-B6-4] Microfabrication of embedded optical waveguide struture in flexible electrical circuit substrate by proton beam writing (PBW) procedure

〇Ryuhei Takahashi¹, Satoshi Miura¹, Ryota Saruya¹, Shunsuke Kawabata¹, Kenta Miura¹, Wataru Kada¹, Masashi Koka², Takahiro Satoh², Tomihiro Koka², Osamu Hanaizumi¹, Kumar Parajuli¹ (1.Gunma Univ., 2.QST/TARRI)

Keywords:proton beam writing, optical waveguide, polyimide