1:15 PM - 1:45 PM
[14p-B7-3] Sputter-deposited SiO2 Film and Laser-crystallized Si Film
Keywords:Sputter-deposited
Presentation information
Symposium (Oral)
Symposium » Crystallization of IV element Semiconductor thin-film and Deffects control
[14p-B7-1~17] Crystallization of IV element Semiconductor thin-film and Deffects control
Wed. Sep 14, 2016 12:30 PM - 7:15 PM B7 (Exhibition Hall)
Naoto Matsuo(Univ. of Hyogo), Seiichiro Higashi(Hiroshima Univ.), Noritaka Usami(Nagoya Univ.), Ichiro Yonenaga(Tohoku Univ.)