The 77th JSAP Autumn Meeting, 2016

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Symposium (Oral)

Symposium » Crystallization of IV element Semiconductor thin-film and Deffects control

[14p-B7-1~17] Crystallization of IV element Semiconductor thin-film and Deffects control

Wed. Sep 14, 2016 12:30 PM - 7:15 PM B7 (Exhibition Hall)

Naoto Matsuo(Univ. of Hyogo), Seiichiro Higashi(Hiroshima Univ.), Noritaka Usami(Nagoya Univ.), Ichiro Yonenaga(Tohoku Univ.)

2:45 PM - 3:15 PM

[14p-B7-7] Growth kinetics and application of crystalline silicon thin film obtained by aluminum-induced layer exchange process

〇Noritaka Usami1 (1.Nagoya Univ.)

Keywords:aluminum-induced layer exchange process

We will overview our recent research activities on aluminum-induced layer exchange process to realize wafer-equivalent crystalline silicon thin films including fundamental understanding of growth kinetics based on in situ monitoring, applications to the template for heteroepitaxy and highly-doped films, and so on.