[14p-C302-2~10] 4.1 Plasmonics

▲ [14p-C302-3] Fabrication of Nanoparticle Arrays of Titanium Nitride by Nanoimprint lithography and their Plasmonic Properties

Ryosuke Kamakura¹, 〇Shunsuke Murai^1,2, Koji Fujita¹, Katsuhisa Tanaka¹ (1.Kyoto University, 2.PRESTO-JST)

Keywords:Titanium nitride, Nanoparticle array, Collective plasmonic mode

We have fabricated two-dimensional diffractive arrays of TiN nanoparticles by taking advantage of its compatibility with nanofabrication technique. The thin films of TiN were structured to the arrays of nanoparticles by the combination of nanoimprint lithography and reactive ion etching. The choice of periodic array comes from its ability to support collective plasmonic mode; thanks to the periodicity on the order of lightwaves, the localized surface plasmon polaritons excited on each nanoparticles are radiatively coupled through diffraction. The results of optical transmission indicate that the arrays support the collective plasmonic modes. Numerical simulation visualizes the intense fields accumulated both in the nanoparticles and in between the particles, confirming that the collective mode originates from the simultaneous excitation of localized surface plasmon polaritons and diffraction.