[14p-C31-1~13] 3.7 Laser processing

△ [14p-C31-12] Processing of gold thin film using six-beam interference pattern of ultra-short pulse laser

〇(M1)Masataka Yoshida¹, Kazuhito Osawa¹, Yoshiki Nakata¹, Noriaki Miyanaga¹ (1.Osaka Univ.)

Keywords:laser processing

We demonstrated metal thin film processing by using interference pattern of six ultra-short pulse laser beams. As a result, nanostructures in hexagonal lattice were fabricated in a single shot, and the lattice constant was [mm]. Nanostructures such as nanodrop and MHA (Metallic Hole Array) were selectively fabricated as functions of film thickness and fluence. These results enable us to fabricate metamaterials, which are different from those fabricated by interference patterns of four beams.