[14p-C31-1~13] 3.7 Laser processing

△ [14p-C31-13] Beam intensity distribution shaping by use of Spatial Light Modulator

〇Kazuhito Osawa¹, Masataka Yoshida¹, Yoshiki Nakata¹, Noriaki Miyanaga¹, Aiko Narazaki², Tatsuya Shoji³, Yasuyuki Tsuboi³ (1.Osaka Univ., 2.AIST, 3.Osaka City Univ.)

Keywords:Laser Processing, Spatial Light Modulator

We demonstrated beam intensity distribution shaping by use of Spatial Light Modulator (SLM) and 4f system. Spatial phase distribution of a femtosecond laser beam was modulated periodically by SLM. By removing the higher spatial frequency at Fourier plane in 4f system by a spatial filter, the amplitude distribution of the zero-order beam was shaped to flat-top. This result enables us to fabricate large area devices using multi-shot processing.