[14p-C31-1~13] 3.7 Laser processing

△ [14p-C31-6] Femtosecond laser induced the modification at the interface between aluminum and diamond single crystal

〇Yuki Masai¹, Tomoyuki Ueki¹, Yasuhiro Tanaka², Takuro Tomita¹, Tatsuya Okada¹ (1.Tokushima Univ., 2.Kagawa Univ.)

Keywords:femto second laser, diamond, periodic structure

An aluminum thin film was deposited onto a diamond single crystal. The interface between aluminum film and diamond crystal was irradiated by femto second laser. The cross-section of the irradiated line was examined with transmission electron microscopy (TEM). We observed the formation of fine periodic structure with a wavelength of 130 nm. The region above periodic structure was amorphized. We found the evidence of carbon diffusion in the amorphized region with a TEM/EELS method.