The 77th JSAP Autumn Meeting, 2016

Presentation information

Oral presentation

3 Optics and Photonics » 3.7 Laser processing

[14p-C31-1~13] 3.7 Laser processing

Wed. Sep 14, 2016 1:45 PM - 5:30 PM C31 (Nikko Kujaku AB)

Tadatake Sato(AIST), Aiko Narazaki(AIST)

4:15 PM - 4:30 PM

[14p-C31-9] Formation mechanisms of polarization-dependent periodic nanostructures in β-Ga2O3 semiconductor

Yuta Nakanishi1, Yasuhiko Shimotsuma1, Masaaki Sakakura2, Kiyotaka Miura1 (1.Kyoto Univ., 2.SACI, Kyoto Univ.)

Keywords:semiconductor, periodic nanostructure, femtosecond laser

Recently, we have successfully observed self-assembled periodic nanostructures inside indirect bandgap semiconductor; Si and GaP, by the femtosecond double pulse irradiation. In this study, to elucidate the formation mechanism, we irradiated the femtosecond laser to β-Ga2O3 crystals (indirect bandgap;Eg ~ 4.8 eV) and observed the modified region.