The 77th JSAP Autumn Meeting, 2016

Presentation information

Print

Oral presentation

9 Applied Materials Science » 9.2 Nanowires and Nanoparticles

[14p-D62-1~20] 9.2 Nanowires and Nanoparticles

Wed. Sep 14, 2016 1:30 PM - 7:00 PM D62 (Bandaijima Bldg.)

Shinjiroh Hara(Hokkaido Univ.), Zhang Guoqiang(NTT), Ishikawa Fumitaro(Ehime Univ.)

4:30 PM - 4:45 PM

[14p-D62-12] Fabrication and evaluation of SiNP-SiGe0.3 composite based on neutral beam etching technique

〇AKIOU KIKUCHI2,4, AKIFUMI YAO4, ISAMU MORI4, TAKAHITO ONO2, SEIJI SAMUKAWA1,3 (1.IFS, Tohoku Univ., 2.GSE, Tohoku Univ, 3.AIMR, Tohoku Univ., 4.Central Glass)

Keywords:Silicon nano pillar