[14p-P11-1~6] 1.1 Interdisciplinary and General Physics

[14p-P11-6] Effect of Intermediate Layers such as GeO and Cr on Surface Conditions of Pd/Ge

〇Akihiro Aizawa¹, Koichi Matsushita¹, Sumio Okuyama¹ (1.Yamagata Univ.)

Keywords:contact angle, palladium, hydrogen gas

In order to control the sensitivity degradation of Pd/Ge diode hydrogen gas sensor, we look at the effects of intermediate layers such as GeO and Cr on surface conditions of Pd; contact angles, and interface conditions of Pd/Ge; peel-off of Pd thin film from substrate. In the case of Cr intermediate layer, we could get the change of the contact angles of water droplets on Pd thin film in hydrogen gas and suppress the peel-off of Pd thin film from substrate.