[14p-P15-1~2] 7.2 Applications and technologies of electron beams

[14p-P15-1] Dependence of the working distance and the applied bias on the surface potential distribution of insulating specimen irradiated by electron beam

〇(M2)Masasi Tokai¹, Takuya Kawamoto¹, Masatoshi Kotera¹ (1.Osaka Institute of Technology)

Keywords:SEM, Charging, Surface potential