[14p-P18-1~19] 12.6 Nanobiotechnology

[14p-P18-14] Improvement of fabrication process for semiconductor silicon chips with micro-apertures for formation of artificial bilayer lipid membranes

〇Daisuke Tadaki¹, Ayumi Hirano-Iwata¹, Kenichi Ishibashi², Shun Araki¹, Miyu Yoshida¹, Kohei Arata¹, Takeshi Ohori³, Hideaki Yamamoto⁴, Michio Niwano³ (1.Tohoku Univ., 2.Hang-Ichi Corp., 3.RIEC, Tohoku Univ., 4.FRIS, Tohoku Univ.)

Keywords:bilayer lipid membranes, semiconductor silicon chips, semiconductor microfabrication technology

Artificially reconstituted bilayer lipid membranes (BLMs) with which ion channel proteins are incorporated can function as highly sensitive bio-sensors. In previous work, we fabricated semiconductor silicon chips with micro-apertures (each diameter was dozens of microns) and succeeded in formation of mechanically stable BLMs. In this study, the yield of fabricating chips was drastically increased by examining and improving each condition of the fabrication process.