[14p-P4-1~5] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[14p-P4-2] Laser Ablation for Creating Nano-Sized Texture on Silicon Surfaces

Shin-ya Asakura¹, 〇Mitsunori Saito¹ (1.Ryukoku Univ.)

Keywords:laser ablation, silicon, nanostructure

Laser pulses (532 nm, 550 ps, 10 μJ) were used for ablation of silicon plates. A large ablation trace with a milk-crown shape was created at the focal point, whereas a hole of ~100 nm diameter was formed with a defocused beam. A 2-D nanohole array, which was created by irradiating a moving plate at 8800 pulses/s, exhibited various colors due to interference. Hexagonal holes were self-formed by etching the ablated silicon plate in an aqueous solution of KOH.