[15a-A22-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

△ [15a-A22-8] Electrical transport properties of Ta-doped SnO₂ epitaxial thin films

〇Michitaka Fukumoto¹, Shoichiro Nakao², Kei Shigematsu², Daisuke Ogawa³, Kazuo Morikawa³, Yasushi Hirose^1,2, Tetsuya Hasegawa^1,2 (1.Univ. of Tokyo, 2.KAST, 3.TIRI)

Keywords:transport properties, mobility, ionic impurity scattering