10:15 〜 10:30
▲ [15a-A25-4] High-yield fabrication of n-type carbon nanotube thin-film transistors on flexible plastic film
キーワード:Carbon nanotube thin film transistor, n-type, High yield fabrication
Carbon nanotube thin-film transistors (CNT TFTs) are envisioned to be active devices for various flexible/stretchable devices because CNTs exhibit excellent mechanical and electrical properties. As-fabricated CNT TFTs normally show p-type characteristics, thus n-type TFTs are necessary to construct complementary metal-oxide-semiconductor-based devices. We have fabricated more than 800 air-stable, n-type CNT TFTs on a flexible plastic substrate with high yield by chemical doping technique. We confirmed 99.5 % of devices changed from p- to n-type characteristics with small hysteresis.