The 77th JSAP Autumn Meeting, 2016

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15a-A26-1~11] 6.2 Carbon-based thin films

Thu. Sep 15, 2016 9:00 AM - 12:00 PM A26 (203-204)

Haruhiko Ito(Nagaoka Univ. of Tech.)

11:30 AM - 11:45 AM

△ [15a-A26-10] The dependence of substrate temperature of film modification of Si-containing hydrogenated DLC films by the soft X-ray irradiation

〇Shotaro Tanaka1, Makoto Okada1, Kazuhiro Kanda1 (1.LASTI, Univ. of Hyogo)

Keywords:Si-DLC, Soft X-ray, Space