[15a-A35-1~10] 9.4 Thermoelectric conversion

[15a-A35-7] Recrystallization of Ge/Au Superlattice Thin Film - For the formation of Nano-Crystal -

〇Yoichi Okamoto^1,2, Yosuke Haga¹, Hisashi Miyazaki¹ (1.Natil.Def.Acad. MSE, 2.NIMS)

Keywords:nano-dots, superlattice, thermoelectrics

The condition for nano-crystal was studied, that was the origin for ultra large thermoelectric power of SiGeAu superlattice thin film, to enhance the reproductionability of ultra large thermoelectric power. To simplify, the GeAu binary superlattice thin films were studied for the early stage of recrystallization. Even in as deposited films, Ge nano-crystals were found.