Direct bonding of single-crystal diamond and Si substrate

Presentation information

Oral presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

Thu. Sep 15, 2016 9:00 AM - 12:30 PM B1 (Exhibition Hall)

Kenji Shiojima(Univ. of Fukui)

10:45 AM - 11:00 AM

〇Jianbo Liang¹, Satoshi Masuya², Makoto Kasu², Naoteru Shigekawa¹ (1.Osaka City Univ., 2.Saga Univ.)

Keywords:Diamond, direct bonding