[15a-B1-1~13] 13.8 Compound and power electron devices and process technology

[15a-B1-8] Electroluminescence Pattern Investigation of the PIN Diode on GaN Substrate

〇(D)Shigeyoshi Usami¹, Yuto Ando¹, Atsushi Tanaka², Kentaro Nagamatsu², Maki Kushimoto¹, Manato Deki², Shugo Nitta², Yoshio Honda², Hiroshi Amano^2,3,4 (1.Nagoya Univ., 2.IMaSS, 3.Akasaki Research Center, 4.VBL)

Keywords:PIN diode, Electroluminescence, Emission microscope