[15a-B13-1~10] 12.3 Functional Materials and Novel Devices

△ [15a-B13-10] Au/Indium-Tin Oxide Multilayers as a Transparent Electrode for Flexible Electronics

〇Yasutoshi Jimbo¹, Matsuhisa Naoji^1,2, Hiroaki Jinno¹, Peter Zalar¹, Tomoyuki Yokota¹, Takao Someya¹ (1.Univ. of Tokyo, 2.ALPS)

Keywords:transparent electrode, flexible, indium-tin oxide

Flexible electrode with high transmittance and low resistance is indispensable to flexible devices which conforms to biological tissues. In this research, indium-tin oxide/Au/indium-tin oxide (ITO/Au/ITO) structure consisting of ultra-thin gold layer sandwiched by double ITO layers was fabricated on 1 μm thick parylene substrate. This fabrication does not include any high temperature process and this transparent electrode showed low resistance (13.8 Ω/sq. ).