The 77th JSAP Autumn Meeting, 2016

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

[15a-B7-1~14] 8.1 Plasma production and control

Thu. Sep 15, 2016 9:00 AM - 12:30 PM B7 (Exhibition Hall)

Tatsuya Misawa(Saga Univ.), Tatsuo Ishijima(Kanazawa Univ.)

12:15 PM - 12:30 PM

[15a-B7-14] Effect of nitrogen on the hydrogen radical generated by inductively coupled plasma

〇(M2)Daiki Tsutsumi1,2, Yuji Okamoto2,3, Takamasa Ishigaki1, Masatomo Sumiya2 (1.Hosei Univ., 2.NIMS, 3.Tsukuba Univ.)

Keywords:plasma