[15a-D63-1~8] 11.1 Fundamental properties

[15a-D63-1] TEM Observation of Focused Ion-beam Damage in Bridge-type Bi2212 Intrinsic Josephson Junctions

Yoshihiro Kakizaki¹, Junpei Koyama¹, Ayami Yamaguchi¹, Shunpei Umegai¹, Shin-ya Ayukawa¹, 〇Haruhisa Kitano¹ (1.Aoyama Gakuin Univ.)

Keywords:Bi-cuprates, intrinsic Josephson junction, focused ion beam

Focused Ion beam (FIB) milling is favor in the down-sizing of the intrinsic Josephson junction (IJJ)devices of high-Tc cuprates, although the ion-beam damage of the milled surface can degrade the I-V characteristics. Unfortunately, there is no report on the quantitative estimate of FIB damage on IJJs. In this study, we succeeded in observing the FIB damage on Bi2212 crystals by using the transmission electron microscope (TEM), and estimated that the depth of FIB damage was at least 40 nm. We also report on a possibility that the FIB damage is removed by using Ar ion milling.