[15a-P3-1~13] 3.7 Laser processing

[15a-P3-11] Ellipticity dependence of laser-induced periodic surface structure on yttria-stabilized zirconia polycrystal

〇Masayuki Kakehata¹, Hidehiko Yashiro¹, Ayako Oyane², Atsuo Ito³, Kenji Torizuka¹ (1.ESPRIT, AIST, 2.NMRI, AIST, 3.HRI, AIST)

Keywords:laser ablation, periodic structure, polarization dependence

Recently, we reported the first LIPSS formation on 3Y-TZP with a Ti:sapphire femtosecond laser.The observed grating-like LIPSS lines are parallel to the linearly polarized light and the period depends on the fluence and pulsewidth. We observed periods comparable to or larger than the laser wavelength, different from the characteristics of LIPSS reported for other materials. In order to investigate these unique LIPSS on 3Y-TZP in more detail, we investigated the LIPSS formation with elliptical polarized light.