[15a-P9-1~20] 9.2 ナノワイヤ・ナノ粒子

▲ [15a-P9-4] Al-Catalyzed Si Nanowires for Photovoltaic Application

〇Wipakorn Jevasuwan¹、Toshiaki Takei¹、Naoki Fukata¹ (1.NIMS)

キーワード：Nanowires, CVD, Al-catalyst

Nanowires (NWs) have been the focus of attentions for future devices due to their unique physical properties which have great potentials for fabrication of NW-based solar cells. Vapor-liquid-solid (VLS) mechanism using nanocluster catalysts of chemical-vapor-deposition (CVD) technique is one of candidates to create high-quality NWs with single crystalline structures and in large quantities [3]. From our previous report, we presented SiNW formed by VLS growth using Al which has been recently proposed as a new alternative catalyst. The effects of substrate temperature on Al-catalyzed SiNW formation have been discussed. In this study, light reflectance of Al-catalyzed SiNWs was further examined. Al removal from SiNWs by diluted HF after CVD growth was observed and SiNW-based solar cells were demonstrated.