The 77th JSAP Autumn Meeting, 2016

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Oral presentation

15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[15p-A23-1~20] 15.8 Crystal evaluation, impurities and crystal defects

Thu. Sep 15, 2016 1:15 PM - 6:45 PM A23 (201B)

Takahiro Maeta(Global Wafers Japan), Takuto Kojima(Meiji Univ.), Yutaka Ohno(Tohoku Univ.)

6:00 PM - 6:15 PM

[15p-A23-18] Synchrotron Radiation X-ray Topography by Simultaneous Diffractions from Equivalent Lattice Planes in Si for Determination of Dislocation Burgers Vectors

〇Yoshiyuki Tsusaka1, Tetsuya Tsurumaru1, Junji Matsui2 (1.Univ. of Hyogo , Graduate School of Materials Sci., 2.Univ. of Hyogo, Syn. Rad. Nano-Tech. Center)

Keywords:X-ray topography, dislocation, synchrotron radiation