[15p-A25-1~17] 17.1 Carbon nanotubes & other nanocarbon materials

[15p-A25-16] Nanodiamond synthesis on Si surface utilizing the dc methane/hydrogen plasma

〇Kazuki Uchida¹, Tomoki Kobayasi¹, Yuto Nawata¹, Masamichi Naitoh¹, Tomonori Ikari², Tatsuzo Nagai³, Fumiya Shoji³ (1.Grad. School of Life Sci. & Sys. Eng., Kyushu Inst. Tech, 2.National Institute of Technology, Ube College, 3.KKU Res. Institute)

Keywords:Carbon nanoparticle, Plasma CVD, Nanodiamond thin film

We have reported that diamonds are formed on high temperature Si(100) substrates, using the low pressure columnar methane/hydrogen plasma. In this study, focusing on the plasma sheath formed right on the substrate surface, we investigate the synthesis of ca. 20nm diamonds and the nanodiamond films on high temperature Si(100) surfaces.