The 77th JSAP Autumn Meeting, 2016

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13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Minoru Sasaki(Toyota Tech. Inst.)

1:45 PM - 2:15 PM

[15p-B10-1] [INVITED] MEMS for photonics integration

〇Kazuhiro Hane1, Takashi Sasaki1, Borriboon Thubthimthong1 (1.Tohoku Univ.)

Keywords:MEMS, Si photonics, Integration

MEMS integration is useful in several industrial fields. Integration of Si photonics with LSI and MEMS is especially promising since each field is based on Si technology. In this presentation, we introduce our research activities on a few topics of photonics integration relating to technologies of MEMS actuator and different material integration.