[15p-B12-1~19] 3.12 Nanoscale optical science and near-field optics

[15p-B12-9] Analysis of optical properties of metal grating on semiconductor substrate

〇Ryo Kikkawa¹, Shogo Shimatani¹, Yutaka Kadoya¹, Munehiro Nishida¹ (1.AdSM,Hiroshima Univ.)

Keywords:plasmonics, metal grating

In this research, we analyzed the metal grating on semiconductor substrate by using numerical analysis methods.The features of this structure are that it is intended for device applications.We show the results analyzing the physical factors causing several phenomenons on this structure.