The 77th JSAP Autumn Meeting, 2016

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[15p-B9-1~17] 13.3 Insulator technology

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

Tsutomu Tezuka(TOSHIBA), Toyohiro Chikyo(NIMS)

4:15 PM - 4:30 PM

[15p-B9-12] Dielectric Functions of Thermally-grown SiO2 and GeO2 as Evaluated from XPS

〇Taishi Yamamoto1, Akio Ohta1, Mitsuhisa Ikeda1, Katsunori Makihara1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:Insulator