[15p-P1-1~9] 1.5 Instrumentation, measurement and Metrology

△ [15p-P1-6] Basic Study for Texture Measurement by Multimodal Sensor with Force, Light and Temperature Sensitivity

〇(M2)Kenta Takahashi¹, Fumiya Sato¹, Takashi Abe¹, Masanori Okuyama², Haruo Noma³, Masayuki Sohgawa¹ (1.Niigata Univ., 2.Osaka Univ., 3.Ritsumeikan Univ.)

Keywords:sensor

In this work, texture measurements including tactile, visual, and warm/cool sensations by multimodal MEMS sensor have been reported. This MEMS sensor has force sensitivity by NiCr strain gauge film on the microcantilever and light sensitivity by the photoconductive effect in Si. In addition, it can be used for measurement of thermal properties which give warm/cool sensation, because impedance of Si also depend on temperature. The impedance and resistance changes after contacting with target objects are correlated with their thermal conductivity. Furthermore, touch force and reflected light from the object can be detected as resistance and impedance change, respectively. Therefore, it has been demonstrated that texture features including warm/cool sensation can be characterized by a single MEMS sensor.