[15p-P13-1~17] 16.3 シリコン系太陽電池

▲ [15p-P13-10] Optimization of a-Si (i) Passivation Layer Fabricated by Facing Target Sputtering (FTS) Method

〇Akira Faris¹、Kazuyoshi Nakada¹、Shinsuke Miyajima¹ (1.Dept. of Electrical and Electronic Eng.)

キーワード：Silicon Solar Cells, Passivation, Sputtering