XPS Characterization of AlO<sub>x</sub> Film Deposited by LIA Sputtering Method

Presentation information

Poster presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P13 (Exhibition Hall)

1:30 PM - 3:30 PM

〇Fumiya Nishimura¹, Hidenobu Mori¹, Koji Arafune¹, Shinichi Satoh¹, Haruhiko Yoshida¹ (1.Univ. of Hyogo)

Keywords:solar cell, fixed charge, XPS