[15p-P13-1~17] 16.3 Bulk, thin-film and other silicon-based solar cells

[15p-P13-14] Development of an AFM/KFM combined setup for measuring the solar cell structures

〇(PC)Fumihiko Yamada¹, Takefumi Kamioka¹, Yoshio Ohshita¹, Itaru Kamiya¹ (1.Toyota Tech. Inst.)

Keywords:Crystalline Si solar cells, AFM/KFM, Workfunction mapping

We developed an AFM/KFM setup for analysis of the electric properties for working device. AFM/KFM setup can measure cross-sectional sample under dark and illuminated condition. The electric properties of solar cell can be analyzed using a date of local potential changing and carrier distribution. In this paper, we discuss about the workfunction mapping of p-n junction on crystalline Si substrate.