[15p-P14-1~71] 2 Ionizing Radiation（Poster）

[15p-P14-68] X-ray transmission characteristic measurements of polycapillary optics for a TES microcalorimeter EDS system on a scanning transmission electron microscope

〇Yukiko Tsuru¹, Akira Takano¹, Keisuke Maehata¹, Naoko Iyomoto¹, Toru Hara², Kazuhisa Mitsuda³, Noriko Yamasaki³, Keiichi Tanaka⁴ (1.Kyushu Univ., 2.NIMS, 3.JAXA, 4.Hitachi High-Tech Science)

Keywords:Polycapilary, TES microcalorimeter, STEM

An energy-dispersive spectrometer (EDS) with a superconducting transition edge sensor (TES) microcalorimeter mounted on a scanning transmission electron microscope (STEM) has been developed to enhance the accuracy of nanoscale material analysis. We used polycapillary optics to collect X-rays. We evaluated X-ray transmission characteristics of the optics to realize a high-accuracy analysis.