The 77th JSAP Autumn Meeting, 2016

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-P2-1~15] 6.2 Carbon-based thin films

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P2 (Exhibition Hall)

1:30 PM - 3:30 PM

[15p-P2-7] Development of a Plasma Source for Sputter Deposition of Charge Exchange Carbon Foil

〇Keita Kanamori1, Masahiro Yoshimoto2, Michikazu Kinsho2, Toshirou Kasuya1, Motoi Wada1 (1.Doshisha Univ., 2.J-PARC)

Keywords:Diamond, ECR plasma, Sputtering