[15p-P6-1~16] 8.3 deposition of thin film and surface treatment

△ [15p-P6-11] Development of Multifunctional Biosensor Using Capillary Atmospheric Pressure Plasma Jets

〇Masahiro Kimpara¹, Tomy Abuzairi^2,3, Masaaki Nagatsu^1,2 (1.Shizuoka Univ., 2.Shizuoka Univ, 3.Universitas Indonesia)

Keywords:plasma, carbonnanotube