[15p-P6-1~16] 8.3 deposition of thin film and surface treatment

[15p-P6-8] Effect of Plasma Jet Pretreatment on the Surface Formation of Cs Adsorbed Thermionic Emitter

〇Kenjiro Murata¹, Akihisa Ogino¹, Naoya Morioka², Yuji Kimura² (1.Shizuoka Univ., 2.DENSO CORP.)

Keywords:surface treatment, atmospheric pressure plasma jet, electron emission

Diamond thin films have attracted considerable interest as a hot emitter such as thermionic energy converter, since the lower electron affinity will be obtained by cesium adsorbed on the oxygen terminated surface. To improve the stability of cesium adsorption and the electron emission characteristics, the effect of oxygen terminated diamond surfaces treated by plasma jet was investigated. As a result, the emission current increased with the plasma treatment time. The result was considered with the results of XPS surface analysis.